Guide to Characteristics and Characterization
of Semiconductor Surfaces
By: Jerzy Ruzyllo (Penn State University, USA)
https://doi.org/10.1142/12792 | May 2025 | Pages: 220
This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features.
Based on the author's over thirty years of research and graduate advising in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers and industry professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring.
- FRONT MATTER i–xv
- Chapter 1: Surface as a Part of Semiconductor Device Material System 1–14
- Chapter 2: Effect of Surface on Characteristics of Semiconductor Materials 15–36
- Chapter 3: Interactions of Semiconductor Surfaces 37–56
- Chapter 4: Characteristics of Semiconductor Surface Defining its Condition 57–68
- Chapter 5: Surface Effects in Semiconductor Devices 69–79
- Chapter 6: Surface Processing in Semiconductor Device Technology 81–117
- Chapter 7: Semiconductor Surface Characterization Methods 119–152
- Chapter 8: Characterization of Semiconductor Surfaces in Process Monitoring 153–176
- BACK MATTER 177–201
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