[paper] An Accurate Analytical Modeling of Contact Resistances in MOSFETs

G. Bokitko, D. S. Malich, V. O. Turin*, and G. I. Zebrev

An Accurate Analytical Modeling of Contact Resistances in MOSFETs

Preprint · May 7, 2021 DOI: 10.13140/RG.2.2.29348.40321

National Research Nuclear University MEPHI, Moscow, Russia;
*Orel State University, Russia;

Abstract: As the MOSFET channel lengths decrease, the influence of parasitic source-drain resistance on the current characteristics becomes more and more important. The contact resistance is becoming a growing impediment to transistor power and performance scaling. This is a common challenge for SOI FETs, FinFETs and GAAFETs and any other type of transistor. Most of the modern compact models that are used in circuits simulations are too much technology oriented. We find it important to construct an analytical approach that could be served as a basis for compact modeling. This approach is based on analytical solution Kirchhoff’s equations and on the diffusion-drift field effect transistor model.

Fig: Equivalent MOSFET circuit with series resistance