[paper] Universal Charge Model for Multigate MOS Structures

Kwang-Woon Lee and Sung-Min Hong

Derivation of a Universal Charge Model for Multigate MOS Structures

with Arbitrary Cross Sections

IEEE TED (2022, Early Access)

DOI:  10.1109/TED.2022.316486

   

* Gwangju Institute of Science and Technology (KR)

Abstract: A universal equation for the charge-voltage characteristics in the multigate metal oxide semiconductor (MOS) structure with an arbitrary cross section is presented. A generalized coordinate is proposed and the Poisson equation is integrated with a weighting factor related with the generalized coordinate and the electric field. A compact charge model is derived and analytic and numerical examples for various MOS structures are shown.

Fig: Thin slab in the semiconductor channel region of the multigate MOS structure. The A∗ surfaces are perpendicular to the z-direction, which is the transport direction and its generalized coordinate, ψ, for rectangular nanosheet MOS structures at 0.0 V (top) and 0.7 V (bottom).

Aknowlegements: This workwas supported by the National Research Foundation of Korea (NRF) Grant funded by the Korean Government under Grant NRF- 2019R1A2C1086656 and Grant NRF-2020M3H4A3081800.