[paper] GCC Method for Determining MOSFET VTH

Matthias Bucher¹, Nikolaos Makris¹, Loukas Chevas¹

Generalized Constant Current Method for Determining MOSFET Threshold Voltage

arXiv:2008.00576v1 (2 Aug 202) 

has been submitted to the IEEE for possible publication

¹ School of Electrical and Computer Engineering, Technical University of Crete

Abstract: A novel method for extracting threshold voltage (VTH) and substrate effect parameters of MOSFETs with constant current bias at all levels of inversion is presented. This generalized constant-current (GCC) method exploits the charge-based model of MOSFETs to extract threshold voltage and other substrate-effect related parameters. The method is applicable over a wide range of current throughout weak and moderate inversion and to some extent in strong inversion. This method is particularly useful when applied for MOSFETs presenting edge conduction effect (subthreshold hump) in CMOS processes using Shallow Trench Isolation (STI).

Fig:  Application of the GCC method in presence of edge conduction phenomenon in STI MOSFETs. A constant current is applied to determine pinchoff voltage for the center transistor in moderate inversion at IC=2. To characterize the edge transistor, imposing a current criterion IC=1E−4 corresponds to ICe≈0.02. Pinchoff voltage (VP) and slope factor n characteristics illustrate the determination of parameters for center and edge transistors.

Acknowledgment: This work was partly supported under Project INNOVATION-EL-Crete

(MIS 5002772).