Pramana Modelling Labs, Glasgow, UK
School of Engineering, University of Glasgow, UK
Semiwise Ltd., Glasgow, UK
| Name | File Type | Size |
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| 2997_README_v4.txt | Plain text | 4.46 kB |
| ETest Tile.zip | Compressed file archive | 3.81 MB |
| MPW-5 Test Tile.zip | Compressed file archive | 39.5 MB |
* UNSW, Sydney, NSW 2052, Australia
Fig: Comb-drive fabrication: a Grow oxide; b deposit thick UHVEEPolySi; c electrical pads patterned; d pattern the comb-drive; e backside pattern; f DRIE of UHVEEPolySi; g STS ICP oxide and DRIE from backside; h Remove Cr using O2 plasma; i HF vapor etch
Acknowledgements: The authors wish to acknowledge the Australian National Fabrication Facility (ANFF) NSW node, the School of Photovoltaic & Renewable Energy Engineering (SPREE) and the Electron Microscope Unit at UNSW, where fabrication and film characterization were conducted. In addition, the authors acknowledge the financial support received from the School of Electrical Engineering & Telecommunications (EE) and UNSW Sydney.
Abstract : In high-energy physics, there is a need to investigate alternative silicon sensor concepts that offer cost-efficient, large-area coverage. Sensors based on CMOS imaging technology present such a silicon sensor concept for tracking detectors. The CMOS Strips project investigates passive CMOS strip sensors fabricated by LFoundry in a 150 nm technology. By employing the technique of stitching, two different strip sensor formats have been realised. The sensor performance is characterised based on measurements at the DESY II Test Beam Facility. The sensor response was simulated utilising Monte Carlo methods and electric fields provided by TCAD device simulations. This study shows that employing the stitching technique does not affect the hit detection efficiency. A first look at the electric field within the sensor and its impact on generated charge carriers is being discussed.
Fig : Schematic layout of the Regular (a) and Low Dose 30/55 (b) strip implant designs
Acknowledgements : The measurements leading to these results have been performed at the Test Beam Facility at DESY Hamburg (Germany), a member of the Helmholtz Association (HGF).
Abstract: In the last few years, the 28 nm CMOS technology has raised interest in the High Energy Physics community for the design and implementation of readout integrated circuits for high granularity position sensitive detectors. This work is focused on the characterization of the 28 nm CMOS node with a particular focus on the analog performance. Small signal characteristics and the behavior of the white and 1/f noise components are studied as a function of the device polarity, dimensions, and bias conditions to provide guidelines for minimum noise design of front-end electronics. Comparison with data extracted from previous CMOS generations are also presented to assess the performance of the technology node under evaluation.
Acknowledgements: The authors thank Johannes Kepler University for funding the open-access publication, Google and SkyWater Technologies for igniting this recent wave of open-source IC design, and the large crowd of enthusiasts spending their time on developing and maintaining an extensive array of exciting open-source EDA projects. Open access funding provided by Johannes Kepler University, Linz.
* School of Integrated Circuits, Peking University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing, 100871, China
Abstract: This paper presents a monolithically integrated aptasensor composed of a piezoresistive microcantilever array and an on-chip signal processing circuit. Twelve microcantilevers, each of them embedded with a piezoresistor, form three sensors in a Wheatstone bridge configuration. The on-chip signal processing circuit consists of a multiplexer, a chopper instrumentation amplifier, a low-pass filter, a sigma-delta analog-to-digital converter, and a serial peripheral interface. Both the microcantilever array and the on-chip signal processing circuit were fabricated on the single-crystalline silicon device layer of a silicon-on-insulator (SOI) wafer with partially depleted (PD) CMOS technology followed by three micromachining processes. The integrated microcantilever sensor makes full use of the high gauge factor of single-crystalline silicon to achieve low parasitic, latch-up, and leakage current in the PD-SOI CMOS. A measured deflection sensitivity of 0.98 × 10−6 nm−1 and an output voltage fluctuation of less than 1 ΞΌV were obtained for the integrated microcantilever. A maximum gain of 134.97 and an input offset current of only 0.623 nA were acquired for the on-chip signal processing circuit. By functionalizing the measurement microcantilevers with a biotin-avidin system method, human IgG, abrin, and staphylococcus enterotoxin B (SEB) were detected at a limit of detection (LOD) of 48 pg/mL. Moreover, multichannel detection of the three integrated microcantilever aptasensors was also verified by detecting SEB. All these experimental results indicate that the design and process of monolithically integrated microcantilevers can meet the requirements of high-sensitivity detection of biomolecules.
Open Access: this article is licensed under a Creative Commons Attribution 4.0 International License