Chandan Yadav, Marina Deng, Magali De Matos, Sebastien Fregonese
and Thomas Zimmer
IMS Laboratory, University of Bordeaux
351 cours de la Libération – 33405 Talence cedex, France
Abstract: In this paper, we present the effect of different
sub-mm and mm-wave probe geometry and topology on the
measurement results of dedicated test-structures calibrated with
on-wafer TRL. These results are compared against 3D EM
simulation of the intrinsic test-structures. To analyze difference
between the measured and intrinsic EM simulation results, onwafer
TRL calibration performed on EM simulation results of a
dedicated test-structure is also presented.
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| FIG: 3D view of the Open-M1 where metal-1 (M1) does not have connection with ground as shown in the enlarged view. |
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