[paper] Unified Analytical Model for SOI LDMOS

Baoxing Duan, Jingyu Xing, Ziming Dong and Yintang Yang¹ (Senior Member, IEEE)

Unified Analytical Model for SOI LDMOS With Electric Field Modulation

IEEE J-EDS, vol. 8, pp. 686-694, 2020

DOI: 10.1109/JEDS.2020.3006293

¹Key Laboratory of the Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi’an 710071, China

Abstract: The unified analytical model is proposed for SOI LDMOS (Silicon On Insulator Lateral Double-diffused Metal Oxide Semiconductor) based on the electric field modulation in this paper for the first time. The analytical solutions of the surface electric field distributions and potential distributions are derived on the basis of the 2-D Poisson equation. The variation of the buried layer parameters modulates the surface electric field by the electric field modulation effect to optimize the surface electric field distribution of the device. Also, the simulation results obtained through the simulation software ISE are consistent with the expected results of the analytical model. This not only proves the feasibility of the electric field modulation theory, but also shows that the accurate analytical model will be of great guiding significance for designing and optimizing the same LDMOS based on SOI structures.

FIG: Cross-sectional view of electric field modulated SOI LDMOS

Acknowledgment: This work was supported in part by Science Foundation for Distinguished Young Scholars of Shaanxi Province under Grant 2018JC-017, and in part by the 111 Project under Grant B12026.