[paper] Characteristics and ultra-high total ionizing dose response

Termo, Gennaro, Giulio Borghello, Federico Faccio, Kostas Kloukinas, Michele Caselle, Alexander Friedrich Elsenhans, Ahmet Cagri Ulusoy, Adil Koukab, and Jean-Michel Sallese

 Characteristics and ultra-high total ionizing dose response 

of 22 nm fully depleted silicon-on-insulator

Journal of Instrumentation 19, no. 03 (2024): C03039

DOI 10.1088/1748-0221/19/03/C03039

a CERN, Geneva, Switzerland

b École Polytechnique Fédérale de Lausanne, Switzerland

c Karlsruhe Institute of Technology, Germany

Abstract: The radiation response of MOS transistors in a 22 nm Fully Depleted Silicon-On-Insulator (FDSOI) technology exposed to ultra-high total ionizing dose (TID) was investigated. Custom structures including n- and p-channel devices with different sizes and threshold voltage flavours were irradiated with X-rays up to a TID of 100 Mrad(SiO2) with different back-gate bias configurations, from −8 V to 2 V. The investigation revealed that the performance is significantly affected by TID, with the radiation response being dominated by the charge trapped in the buried oxide.

Fig: Schematic of the irradiated transistors in 22 nm FDSOI 

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