[paper] Characterization of ultrathin FDSOI devices using subthreshold slope method

Teimuraz Mchedlidze¹, and Elke Erben²

Characterization of ultrathin FDSOI devices using subthreshold slope method

Phys. Status Solidi A. Accepted Manuscript

DOI: 10.1002/pssa.202000625

1 TU Dresden, Germany

2 Globalfoundries, Dresden, Germany

Abstract: The subthreshold current-voltage (subthreshold slope) characteristic of fully depleted silicon-on-insulator high-k dielectric-metal gate field-effect transistor is applied for evaluation of the interface traps located at both, the front and back channels. The proposed characterization method allows an estimation of averaged trap densities separately for the front and the back interfaces of the channel. Performing subthreshold slope measurements at several temperatures allow the extraction of the energy distributions of the interface trap densities for both interfaces and obtaining essential characteristics of the stack.

Fig: Results of ID(VGF,k,T) measurements for EG sample. At each temperature 

(200, 300 and 400K) a group of curves contains data for eight k values

(k = 0 to 3 with step 0.5 and kOC; solid curve). 

Acknowledgements: The authors would like to acknowledge funding of the study in the frames of the IPCEI WIN- FDSOI project from Global Foundries. We want to thank Jörg Weber (TU Dresden), Luca Pirro (Global Foundries) and Rolf Öttking (AQ Computare, Chemnitz) for thoughtful discussions and suggestions.