[paper] Native High-k Oxides for 2D Transistors

Yury Yu. Illarionov^1,2, Theresia Knobloch¹ and Tibor Grasser¹

Native high-k oxides for 2D transistors

Nature Electronics vol. 3, pp 442–443 (2020)

Published online: 05 August 2020

DOI: 10.1038/s41928-020-0464-2

¹Institute for Microelectronics, TU Wien, Vienna, Austria
²Ioffe Physical-Technical Institute, St Petersburg, Russia

Abstract: The two-dimensional semiconductor Bi₂O₂Se can be oxidized to create an atomically thin layer of Bi₂SeO₅ that can be used as the insulator in scaled field-effect transistors.

Fig.: Development of FETs with Bi₂O₂Se channels and native Bi₂SeO₅ insulators. a.) Step-by-step oxidation of multilayer Bi₂O₂Se towards Bi₂SeO₅ and the crystal structure of the two materials. b.) Cross-sectional scanning transmission electron microscopy image confirming the atomically sharp interface. c.) Schematic of the top-gated devices fabricated with a native gate oxide. d.) Gate transfer characteristics of the devices with a 4.6-nm-thick Bi₂SeO₅ layer (EOT below 1 nm)