[paper] Compact Modeling of Parasitic FET capacitance

Sharma, S. M., Singh, A., Dasgupta, S., & Kartikeyan, M. V. 

A review on the compact modeling of parasitic capacitance: 

from basic to advanced FETs. 

Journal of Computational Electronics

DOI: 10.1007/s10825-020-01515-4

Abstract: This paper presents a review on the development of parasitic-capacitance modeling for metal–oxide–semiconductor feldefect transistors (MOSFETs), covering models developed for the simple parallel-plate capacitance and the nonplanar and coplanar plate capacitances required for the intrinsic and extrinsic part of such devices. A comparative study of various extrinsic capacitance models with respect to a reference model is used to analyze the benefts of the various approaches. Capacitance models for basic MOSFETs and advance multigate FETs with two-dimensional (2D) and three-dimensional (3D) structures are reviewed. It is found that the elliptical feld lines between the gate electrodes and source/drain region are modeled very well, while deviations of ±2% in the orthogonal plate capacitance are observed when the gate electrode thickness is varied from 5 to 20nm.

Fig: The 3D structure of a FinFET

Acknowledgements: The authors would like to thank the Department of Electronics and Communication Engineering, IIT Roorkee, for their valuable support in carrying out this research work.