[paper] Importance of complete characterization setup on onwafer TRL calibration in sub-THz range

Chandan Yadav, Marina Deng, Magali De Matos, Sebastien Fregonese

and  Thomas Zimmer

IMS Laboratory, University of Bordeaux

351 cours de la Libération – 33405 Talence cedex, France

Abstract: In this paper, we present the effect of different sub-mm and mm-wave probe geometry and topology on the measurement results of dedicated test-structures calibrated with on-wafer TRL. These results are compared against 3D EM simulation of the intrinsic test-structures. To analyze difference between the measured and intrinsic EM simulation results, onwafer TRL calibration performed on EM simulation results of a dedicated test-structure is also presented. 

FIG: 3D view of the Open-M1 where metal-1 (M1) does not have connection with ground as shown in the enlarged view.